| Title | Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan |
| Publication Type | Conference Paper |
| Year of Publication | 2012 |
| Authors | Liu, L., and H. Xie |
| Conference Name | Optical MEMS and Nanophotonics (OMN), 2012 International Conference on |
| Date Published | Aug |
| Keywords | 2D confocal image, 3D confocal image, 3D confocal microscopy, actuators, axial scan, depth scan, Electrothermal, electrothermal lens scanner, electrothermal two-axis MEMS mirror, lateral scan, Lenses, MEMS lens scanner, MEMS mirror, microlenses, micromechanical devices, micromirrors, Microscopy, Mirrors, Optical microscopy, optical scanners, scanning electron microscopy, three-dimensional confocal scanning microscope, voltage 3 V, wavelength 475 mum |
| DOI | 10.1109/OMEMS.2012.6318851 |
