Publications

Found 13 results
Author Title Type [ Year(Asc)]
Filters: Keyword is micromirrors  [Clear All Filters]
2013
Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.
Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.
Liao, W., W. Liu, Y. Tang, B. Wang, and H. Xie, "Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 969-972, April, 2013.
Liao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie, "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 526-529, June, 2013.
2012
Liu, L., and H. Xie, "Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan", Optical MEMS and Nanophotonics (OMN), 2012 International Conference on, pp. 158-159, Aug, 2012.
2010
Pal, S., and H. Xie, "Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms", Quantum Electronics, IEEE Journal of, vol. 46, no. 9, pp. 1254 -1260, 09/2010.
2009
Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.
Jia, K., S. Pal, and H. Xie, "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 67 -68, 08/2009.
Wu, L., and H. Xie, "Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, pp. 131 -132, 2009.
Pal, S., and H. Xie, "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 55 -56, 08/2010, 2009.
Pal, S., and H. Xie, "Repeatability study of an electrothermally actuated micromirror", Reliability Physics Symposium, 2009 IEEE International, Montreal, QC, pp. 549 -556, 2009.
Wu, L., and H. Xie, "A scanning micromirror with stationary rotation axis and dual reflective surfaces for 360° forward-view endoscopic imaging", Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International, Denver, CO, USA, IEEE, pp. 2222 -2225, 2009.