Publications

Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.

Wang, D., X. Han, H. Liu, Q. Chen, W. Wang, and H. Xie, "Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.

Li, M., Q. Chen, Y. Liu, Y. Ding, and H. Xie, "Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors", Micromachines, vol. 8, issue 10, pp. 289, Jan-10-2017.

Zhang, H., D. Xu, X. Zhang, Q. Chen, H. Xie, and S. Li, "Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror", Sensors, vol. 15, issue 12, pp. 30991 - 31004, Jan-12-2015.

Chai, J., H. Jia, D. Wang, H. Liu, Q. Chen, and H. Xie, "A MEMS Based Fourier Transform Spectrometer and Its Scan Stability Study", ECS Journal of Solid State Science and Technology, vol. 7, issue 7, pp. Q3025 - Q3031, Sep-03-2018.

Zhou, L., Z. Chen, J. Cheng, Q. Chen, Y. Ding, and H. Xie, "Investigation of dynamic thermal behaviors of an electrothermal micromirror", Sensors and Actuators A: Physical, vol. 263, pp. 269 - 275, Jan-08-2017.

Liu, Y., Y. Feng, X. Sun, L. Zhu, X. Cheng, Q. Chen, Y. Liu, and H. Xie, "Integrated tilt angle sensing for large displacement scanning MEMS mirrors", Optics Express, vol. 26, issue 20, pp. 25736, Jan-01-2018.

Wang, D., H. Liu, J. Zhang, Q. Chen, W. Wang, X. Zhang, and H. Xie, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.

Tseng, V. Farm- Guoo, J. Li, X. Zhang, J. Ding, Q. Chen, and H. Xie, "An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications", Sensors and Actuators A: Physical, vol. 206, pp. 1 - 9, 2/2014.

Duan, C., W. Wang, X. Zhang, J. Ding, Q. Chen, A. Pozzi, and H. Xie, "A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging", 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, IEEE, pp. 948 - 951, 1/2015.