Title | Investigation of dynamic thermal behaviors of an electrothermal micromirror |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | Zhou, L., Z. Chen, J. Cheng, Q. Chen, Y. Ding, and H. Xie |
Journal | Sensors and Actuators A: Physical |
Volume | 263 |
Pagination | 269 - 275 |
Date Published | Jan-08-2017 |
ISSN | 09244247 |
URL | http://linkinghub.elsevier.com/retrieve/pii/S0924424716305891 |
DOI | 10.1016/j.sna.2017.06.002 |
Short Title | Sensors and Actuators A: Physical |