Portable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

TitlePortable Fourier transform infrared spectrometer based on an electrothermal MEMS mirror
Publication TypeConference Paper
Year of Publication2017
AuthorsWang, D., X. Han, H. Liu, Q. Chen, W. Wang, and H. Xie
Conference Name2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
PublisherIEEE
Conference LocationKaohsiung
URLhttp://ieeexplore.ieee.org/document/7994039/
DOI10.1109/TRANSDUCERS.2017.7994039