Title | Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Zhang, H., D. Xu, X. Zhang, Q. Chen, H. Xie, and S. Li |
Journal | Sensors |
Volume | 15 |
Issue | 12 |
Pagination | 30991 - 31004 |
Date Published | Jan-12-2015 |
URL | http://www.mdpi.com/1424-8220/15/12/29840 |
DOI | 10.3390/s151229840 |
Short Title | Sensors |