Title | Integrated tilt angle sensing for large displacement scanning MEMS mirrors |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Liu, Y., Y. Feng, X. Sun, L. Zhu, X. Cheng, Q. Chen, Y. Liu, and H. Xie |
Journal | Optics Express |
Volume | 26 |
Issue | 20 |
Pagination | 25736 |
Date Published | Jan-01-2018 |
URL | https://www.osapublishing.org/abstract.cfm?URI=oe-26-20-25736 |
DOI | 10.1364/OE.26.025736 |
Short Title | Opt. Express |