A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging

TitleA 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging
Publication TypeConference Paper
Year of Publication2015
AuthorsDuan, C., W. Wang, X. Zhang, J. Ding, Q. Chen, A. Pozzi, and H. Xie
Conference Name2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Date Published1/2015
PublisherIEEE
Conference LocationEstoril, Portugal
Keywords2 axis scan, electrothermal actuator, micromirror
DOI10.1109/MEMSYS.2015.7051117
Refereed DesignationRefereed