| Title | A 45°-tilted 2-axis scanning micromirror integrated on a silicon optical bench for 3D endoscopic optical imaging |
| Publication Type | Conference Paper |
| Year of Publication | 2015 |
| Authors | Duan, C., W. Wang, X. Zhang, J. Ding, Q. Chen, A. Pozzi, and H. Xie |
| Conference Name | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Date Published | 1/2015 |
| Publisher | IEEE |
| Conference Location | Estoril, Portugal |
| Keywords | 2 axis scan, electrothermal actuator, micromirror |
| DOI | 10.1109/MEMSYS.2015.7051117 |
| Refereed Designation | Refereed |
