Title | Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | Li, M., Q. Chen, Y. Liu, Y. Ding, and H. Xie |
Journal | Micromachines |
Volume | 8 |
Issue | 10 |
Pagination | 289 |
Date Published | Jan-10-2017 |
URL | http://www.mdpi.com/2072-666X/8/10/289 |
DOI | 10.3390/mi8100289 |
Short Title | Micromachines |