Publications

Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.

Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.

Samuelson, S.R., and H. Xie, "Electrothermally actuated large displacement waveguides", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 109-110, Aug, 2013.

Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.

Liao, W., W. Liu, Y. Tang, B. Wang, and H. Xie, "Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 969-972, April, 2013.

Liao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie, "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 526-529, June, 2013.

Liu, L., and H. Xie, "Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan", Optical MEMS and Nanophotonics (OMN), 2012 International Conference on, pp. 158-159, Aug, 2012.

Pal, S., and H. Xie, "Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms", Quantum Electronics, IEEE Journal of, vol. 46, no. 9, pp. 1254 -1260, 09/2010.

Jia, K., S. Pal, and H. Xie, "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 67 -68, 08/2009.