Publications

Found 7 results

Author Title Type [ Year]

Filters: Keyword is Silicon  [Clear All Filters]

2013

Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.

Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.

Samuelson, S.R., and H. Xie, "Electrothermally actuated large displacement waveguides", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 109-110, Aug, 2013.

Liao, W., W. Liu, J.E. Rogers, F. Usmani, Y. Tang, B. Wang, H. Jiang, and H. Xie, "Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1831-1834, June, 2013.

2012

Li, J., K. D. T. Ngo, G-Q. Lu, and H. Xie, "Wafer-level fabrication of high-power-density MEMS passives based on silicon molding technique", Integrated Power Electronics Systems (CIPS), 2012 7th International Conference on, pp. 1-5, March, 2012.

Li, J., K. D. T. Ngo, G-Q. Lu, and H. Xie, "Wafer-level fabrication of high-power-density MEMS passives based on silicon molding technique", Integrated Power Electronics Systems (CIPS), 2012 7th International Conference on, pp. 1-5, March, 2012.

2011

Boniche, I., and D. P. Arnold, "Micromachined radial thermoelectric modules for power generation using hot gas streams", J. Microelectromechanical Systems, vol. 20, no. 2, 03/2011.