Publications

Found 11 results
Author Title Type [ Year(Asc)]
Filters: Keyword is micromechanical devices  [Clear All Filters]
2014
Duan, C., X. Zhang, D. Wang, Z. Zhou, P. Liang, A. Pozzi, and H. Xie, "An endoscopic forward-viewing OCT imaging probe based on a two-axis scanning mems mirror", Biomedical Imaging (ISBI), 2014 IEEE 11th International Symposium on, pp. 1397-1400, April, 2014.
2013
Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.
Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.
Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.
2012
Liu, L., and H. Xie, "Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan", Optical MEMS and Nanophotonics (OMN), 2012 International Conference on, pp. 158-159, Aug, 2012.
Li, J., K. D. T. Ngo, G-Q. Lu, and H. Xie, "Wafer-level fabrication of high-power-density MEMS passives based on silicon molding technique", Integrated Power Electronics Systems (CIPS), 2012 7th International Conference on, pp. 1-5, March, 2012.
Li, J., K. D. T. Ngo, G-Q. Lu, and H. Xie, "Wafer-level fabrication of high-power-density MEMS passives based on silicon molding technique", Integrated Power Electronics Systems (CIPS), 2012 7th International Conference on, pp. 1-5, March, 2012.
2010
Pal, S., and H. Xie, "Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms", Quantum Electronics, IEEE Journal of, vol. 46, no. 9, pp. 1254 -1260, 09/2010.
2009
Wu, L., and H. Xie, "A scanning micromirror with stationary rotation axis and dual reflective surfaces for 360° forward-view endoscopic imaging", Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International, Denver, CO, USA, IEEE, pp. 2222 -2225, 2009.