Publications

Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.

Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.

Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.

Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.

Wu, L., and H. Xie, "Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, pp. 131 -132, 2009.

Pal, S., and H. Xie, "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 55 -56, 08/2010, 2009.

Pal, S., and H. Xie, "Repeatability study of an electrothermally actuated micromirror", Reliability Physics Symposium, 2009 IEEE International, Montreal, QC, pp. 549 -556, 2009.