Publications

Sui, W., H. Wang, J. Lee, Afzaal Qamar, Mina Rais-Zadeh, and P. X. - L. Feng, "AlScN-on-SiC Thin Film Micromachined Resonant Transducers Operating in High-Temperature Environment up to 600 °C", ADVANCED FUNCTIONAL MATERIALS, June 21 2022.

Wang, H., Z. Chen, H. Yang, H. Jiang, and H. Xie, "A Ceramic PZT-based pMUT Array for Endoscopic Photoacoustic Imaging", Journal of Microelectromechanical Systems, 2020.

Wang, H., Z. Chen, and H. Xie, "A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.

Wang, H., Y. Ma, H. Yang, H. Jiang, Y. Ding, and H. Xie, "MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications", Micromachines, vol. 11, issue 10, pp. 928, Jan-10-2020.

Wang, H., M. Godara, Z. Chen, and H. Xie, "A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers", Sensors and Actuators A: Physical, Jan-03-2019.

Wang, H., M. Li, Y. Yu, Z. Chen, Y. Ding, H. Jiang, and H. Xie, "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.

Wang, H., Y. Yu, Z. Chen, H. Yang, H. Jiang, and H. Xie, "Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT", IEEE Sensors, New Delhi, India, IEEE, 2018.

Wang, H., L. Zhou, X. Zhang, and H. Xie, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.

Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.