Title | Thermal Reliability Study of an Electrothermal MEMS Mirror |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Wang, H., L. Zhou, X. Zhang, and H. Xie |
Journal | IEEE Transactions on Device and Materials Reliability |
Pagination | 1 - 1 |
Date Published | Jan-01-2018 |
ISSN | 1530-4388 |
URL | https://ieeexplore.ieee.org/document/8421239/ |
DOI | 10.1109/TDMR.2018.2860286 |
Short Title | IEEE Trans. Device Mater. Relib. |