Title | A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT |
Publication Type | Journal Article |
Year of Publication | 2020 |
Authors | Wang, H., Z. Chen, and H. Xie |
Journal | Sensors and Actuators A: Physical |
Pagination | 112018 |
Date Published | Jan-05-2020 |
ISSN | 09244247 |
URL | https://www.sciencedirect.com/science/article/pii/S0924424720302636?dgcid=author |
DOI | 10.1016/j.sna.2020.112018 |
Short Title | Sensors and Actuators A: Physical |