Title | A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers |
Publication Type | Journal Article |
Year of Publication | 2019 |
Authors | Wang, H., M. Godara, Z. Chen, and H. Xie |
Journal | Sensors and Actuators A: Physical |
Date Published | Jan-03-2019 |
ISSN | 09244247 |
URL | https://linkinghub.elsevier.com/retrieve/pii/S0924424719300317 |
DOI | 10.1016/j.sna.2019.03.028 |
Short Title | Sensors and Actuators A: Physical |