Title | A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT |
Publication Type | Conference Paper |
Year of Publication | 2019 |
Authors | Wang, H., M. Li, Y. Yu, Z. Chen, Y. Ding, H. Jiang, and H. Xie |
Conference Name | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) |
Publisher | IEEE |
Conference Location | Berlin, Germany |
URL | https://ieeexplore.ieee.org/document/8808528/http://xplorestaging.ieee.org/ielx7/8787960/8808173/08808528.pdf?arnumber=8808528 |
DOI | 10.1109/TRANSDUCERS.2019.8808528 |