A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

TitleA Piezoelectric MEMS Loud Speaker Based on Ceramic PZT
Publication TypeConference Paper
Year of Publication2019
AuthorsWang, H., M. Li, Y. Yu, Z. Chen, Y. Ding, H. Jiang, and H. Xie
Conference Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
PublisherIEEE
Conference LocationBerlin, Germany
URLhttps://ieeexplore.ieee.org/document/8808528/http://xplorestaging.ieee.org/ielx7/8787960/8808173/08808528.pdf?arnumber=8808528
DOI10.1109/TRANSDUCERS.2019.8808528