| Title | AlScN-on-SiC Thin Film Micromachined Resonant Transducers Operating in High-Temperature Environment up to 600 °C |
| Publication Type | Journal Article |
| Year of Publication | 2022 |
| Authors | Sui, W., H. Wang, J. Lee, Afzaal Qamar, Mina Rais-Zadeh, and P. X. - L. Feng |
| Journal | ADVANCED FUNCTIONAL MATERIALS |
| Date Published | June 21 2022 |
| Type of Article | Research Article |
| URL | https://onlinelibrary.wiley.com/doi/epdf/10.1002/adfm.202202204 |
| DOI | 10.1002/adfm.202202204 |
