Publications

Fang, D., H. Qu, and H. Xie, "A 1mW Dual-Chopper Amplifier for a 50-μg√Hz Monolithic CMOS-MEMS Capacitive Accelerometer", 2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers.2006 Symposium on VLSI Circuits, 2006. Digest of Technical Papers., Honolulu, HI, USA, IEEE, pp. 59 - 60, 2006.

Todd, S., A. Jain, H. Qu, and H. Xie, "A 3-D Micromirror Utilizing Inverting-Series-Connected Electrothermal Bimorph Actuators for Piston and Tilt Motion", 2005 IEEE/LEOS International Conference on Optical MEMS and Their Applications, Oulu, Finland, IEEE, August, 2005.

Lu, C-K., H. Qu, H. Xie, and D. J. Young, "CMOS MEMS Accelerometer for Long-Term In Vivo Real-Time Small Animal Biological Monitoring", IEEE Sensors, 2005, Irvine, CA, IEEE, pp. 1377 - 1380, 10/2005.

Jain, A., H. Qu, S. Todd, G. K. Fedder, and H. Xie, "Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation", 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 06/2004.

Qu, H., D. Fang, and H. Xie, "Fabrication and Characterization of an Integrated CMOS-MEMS Accelerometer", Nanotech 2007, Santa Clara, California, USA, 2007.

Qu, H., D. Fang, A. Sadat, J. Yuan, and H. Xie, "High-Resolution Integrated Micro Gyroscope for Space Applications", 41st Space Congress, Cape Canaveral, Florida, USA, 04/2004.

Qu, H., D. Fang, and H. Xie, "An Integrated Fully-Differential CMOS-MEMS Z-axis Accelerometer Utilizing a Torsional Suspension", IEEE NEMS 2008, Sanya, China, 01/2008.

Sadat, A., H. Qu, C. Yu, J. Yuan, and H. Xie, "Low-Power CMOS Wireless MEMS Motion Sensor for Physiological Activity Monitoring", IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 52, issue 12, pp. 2539 - 2551, 12/2005.

Sun, H., D. Fang, K. Jia, F. Maarouf, H. Qu, and H. Xie, "A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers", IEEE Sensors Journal, vol. 11, issue 4, pp. 925 - 933, 04/2011.

Qu, H., D. Fang, and H. Xie, Microfabrication and Characterization of an Integrated 3-Axis CMOS-MEMS Accelerometer: IEEE, pp. 60 - 67, 2005.

Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier", IEEE Sensors Journal, vol. 8, issue 9, pp. 1511 - 1518, 09/2008.

Qu, H., D. Fang, and H. Xie, "A Monolithic CMOS-MEMS 3-Axis Accelerometer with A Low-Noise, Low-Power Dual Chopper Amplifier", Solid-state Sensors, Actuators and Microsystem Workshop, Hilton Head, SC, pp. 224-227, June, 2006.

Xie, H., H. Sun, K. Jia, D. Fang, and H. Qu, "Multi-axis integrated CMOS-MEMS inertial sensors", 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, IEEE, pp. 1394 - 1395, 2010.

Todd, S., A. Jain, H. Qu, and H. Xie, "A Multi-Degree-of-Freedom Micromirror Utilizing Inverted-Series-Connected Bimorph Actuators", Journal of Optics A: Pure and Applied Optics, vol. 8, pp. s352-s359, 06/2006.

Qu, H., and H. Xie, "Process Development for CMOS-MEMS Sensors With Robust, Electrically Isolated Bulk Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 16, issue 5, pp. 1152 - 1161, 10/2007.

Qu, H., D. Fang, and H. Xie, "A Single-crystal Silicon 3-axis CMOS-MEMS Accelerometer", IEEE Sensors, 2004, Vienna, Austria, IEEE, pp. 661 - 664, 10/2004.

Jain, A., H. Qu, S. Todd, and H. Xie, "A Thermal Bimorph Micromirror with Large Bi-Directional and Vertical Actuation", Sensors and Actuators A, vol. 122, pp. 9-15, 07/2005.