Title | A Thermal Bimorph Micromirror with Large Bi-Directional and Vertical Actuation |
Publication Type | Journal Article |
Year of Publication | 2005 |
Authors | Jain, A., H. Qu, S. Todd, and H. Xie |
Journal | Sensors and Actuators A |
Volume | 122 |
Pagination | 9-15 |
Date Published | 07/2005 |
URL | http://www.sciencedirect.com/science/article/B6THG-4FM9MN1-1/2/ff20636354964fb4db124a70f3cdd31a |
DOI | 10.1016/j.sna.2005.02.001 |