Title | A Multi-Degree-of-Freedom Micromirror Utilizing Inverted-Series-Connected Bimorph Actuators |
Publication Type | Journal Article |
Year of Publication | 2006 |
Authors | Todd, S., A. Jain, H. Qu, and H. Xie |
Journal | Journal of Optics A: Pure and Applied Optics |
Volume | 8 |
Pagination | s352-s359 |
Date Published | 06/2006 |
URL | http://stacks.iop.org/1464-4258/8/i=7/a=S10 |
DOI | 10.1088/1464-4258/8/7/S10 |