A Monolithic CMOS-MEMS 3-Axis Accelerometer with A Low-Noise, Low-Power Dual Chopper Amplifier

TitleA Monolithic CMOS-MEMS 3-Axis Accelerometer with A Low-Noise, Low-Power Dual Chopper Amplifier
Publication TypeConference Paper
Year of Publication2006
AuthorsQu, H., D. Fang, and H. Xie
Conference NameSolid-state Sensors, Actuators and Microsystem Workshop
Date PublishedJune
Conference LocationHilton Head, SC