| Title | A 3-D Micromirror Utilizing Inverting-Series-Connected Electrothermal Bimorph Actuators for Piston and Tilt Motion |
| Publication Type | Conference Paper |
| Year of Publication | 2005 |
| Authors | Todd, S., A. Jain, H. Qu, and H. Xie |
| Conference Name | 2005 IEEE/LEOS International Conference on Optical MEMS and Their Applications |
| Date Published | August |
| Publisher | IEEE |
| Conference Location | Oulu, Finland |
| DOI | 10.1109/OMEMS.2005.1540059 |
