Publications
"AlScN-on-SiC Thin Film Micromachined Resonant Transducers Operating in High-Temperature Environment up to 600 °C", ADVANCED FUNCTIONAL MATERIALS, June 21 2022.
, "A Ceramic PZT-based pMUT Array for Endoscopic Photoacoustic Imaging", Journal of Microelectromechanical Systems, 2020.
, "A High-SPL Piezoelectric MEMS Loud Speaker based on Thin Ceramic PZT", Sensors and Actuators A: Physical, pp. 112018, Jan-05-2020.
, "MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications", Micromachines, vol. 11, issue 10, pp. 928, Jan-10-2020.
, "A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers", Sensors and Actuators A: Physical, Jan-03-2019.
, "A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.
, "Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT", IEEE Sensors, New Delhi, India, IEEE, 2018.
, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.
, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
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