Publications
"Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.
, "Integrated Optoelectronic Position Sensor for Scanning Micromirrors", Sensors, vol. 18, issue 4, pp. 982, Jan-04-2018.
, "A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage", 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN), Lausanne, Switzerland, IEEE, 2018.
, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.
, "An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability", Micromachines, vol. 10, issue 5, pp. 323, Jan-05-2019.
, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.
, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
, "Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT", Optics Letters, vol. 44, issue 9, pp. 2232, Jan-01-2019.
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