Title | A Miniature Lens Scanner with an Electrothermally-Actuated Micro-Stage |
Publication Type | Conference Paper |
Year of Publication | 2018 |
Authors | Zhou, L., X. Zhang, Y. Sung, W-C. Shih, and H. Xie |
Conference Name | 2018 International Conference on Optical MEMS and Nanophotonics (OMN)2018 International Conference on Optical MEMS and Nanophotonics (OMN) |
Publisher | IEEE |
Conference Location | Lausanne, Switzerland |
URL | https://ieeexplore.ieee.org/document/8454613/ |
DOI | 10.1109/OMN.2018.8454613 |