Title | An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability |
Publication Type | Journal Article |
Year of Publication | 2019 |
Authors | Zhou, L., X. Zhang, and H. Xie |
Journal | Micromachines |
Volume | 10 |
Issue | 5 |
Pagination | 323 |
Date Published | Jan-05-2019 |
URL | https://www.mdpi.com/2072-666X/10/5/323 |
DOI | 10.3390/mi10050323 |
Short Title | Micromachines |