| Title | An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Zhou, L., X. Zhang, and H. Xie |
| Journal | Micromachines |
| Volume | 10 |
| Issue | 5 |
| Pagination | 323 |
| Date Published | Jan-05-2019 |
| URL | https://www.mdpi.com/2072-666X/10/5/323 |
| DOI | 10.3390/mi10050323 |
| Short Title | Micromachines |
