Publications

Sawant, S. G., N. Wang, M. S. Hanna, C. R. Taylor, and D. P. Arnold, "Fabrication, Characterization, and Modeling of Fully-Batch-Fabricated Piston-Type Electrodynamic Microactuators", Journal of Microelectromechanical Systems, vol. 23, no. 1, pp. 220-229, 2013, 2014.

Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.

Liao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie, "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 526-529, June, 2013.

Pal, S., and H. Xie, "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 55 -56, 08/2010, 2009.

Pal, S., and H. Xie, "Repeatability study of an electrothermally actuated micromirror", Reliability Physics Symposium, 2009 IEEE International, Montreal, QC, pp. 549 -556, 2009.