| Title | Fabrication, Characterization, and Modeling of Fully-Batch-Fabricated Piston-Type Electrodynamic Microactuators |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Authors | Sawant, S. G., N. Wang, M. S. Hanna, C. R. Taylor, and D. P. Arnold |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 23 |
| Start Page | 220 |
| Pagination | 220-229 |
| Date Published | 2013 |
| Type of Article | Journal |
| ISSN | 1941-0158 |
| Other Numbers | ISSN 1057-7157 |
| Keywords | Electrodynamics, magnetic devices, microactuators, microelectromechanical systems |
| URL | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6553571 |
| DOI | 10.1109/JMEMS.2013.2271293 |
| Short Title | J. Microelectromech. Syst. |
