Publications
Found 6 results
Author Title Type [ Year
] Filters: Author is Huikai Xie and Keyword is Silicon [Clear All Filters]
, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.
, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
, "Electrothermally actuated large displacement waveguides", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 109-110, Aug, 2013.
, "Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1831-1834, June, 2013.
, "Wafer-level fabrication of high-power-density MEMS passives based on silicon molding technique", Integrated Power Electronics Systems (CIPS), 2012 7th International Conference on, pp. 1-5, March, 2012.
, "Wafer-level fabrication of high-power-density MEMS passives based on silicon molding technique", Integrated Power Electronics Systems (CIPS), 2012 7th International Conference on, pp. 1-5, March, 2012.