Publications

Guo, Z. Yang, Q. Cheng Zhao, L. Tao Lin, H. T. Ding, X. S. Liu, J. Cui, Z. Chuan Yang, H. Xie, and G. Zhen Yan, "An acceleration switch with a robust latching mechanism and cylindrical contacts", Journal of Micromechanics and Microengineering, vol. 20, issue 5, pp. 055006, 05/2010.

Guo, Z. Yang, X. S. Liu, Z. Chuan Yang, Q. Cheng Zhao, L. Tao Lin, H. Xie, and G. Zhen Yan, "Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 264 - 267, 2010.

Guo, Z. Yang, L. Tao Lin, Q. Cheng Zhao, Z. Chuan Yang, H. Xie, and G. Zhen Yan, "A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure", Journal of Microelectromechanical Systems, vol. 19, issue 3, pp. 458 - 468, 06/2010.

Sun, H., K. Jia, Y. Ding, Z. Yang Guo, X. Liu, G. Zhen Yan, and H. Xie, "A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.

Sun, H., K. Jia, Z. Yang Guo, X. S. Liu, G. Zhen Yan, and H. Xie, A Monolithic Inertial Measurement Unit Fabricated with Improved DRIE Post-CMOS Process: IEEE, 2010.

Guo, Z. Yang, Q. Cheng Zhao, L. Tao Lin, Z. Chuan Yang, H. Xie, and G. Zhen Yan, "Normally On/Off Integrated Latching Acceleration Switch With Controlled Fracture Beams and Independent Multicontact", IEEE Electron Device Letters, vol. 31, issue 2, pp. 129 - 131, 02/2010.