| Title | A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Sun, H., K. Jia, Y. Ding, Z. Yang Guo, X. Liu, G. Zhen Yan, and H. Xie |
| Conference Name | 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors |
| Publisher | IEEE |
| Conference Location | Kona, HI |
| ISBN Number | 978-1-4244-8170-5 |
| DOI | 10.1109/ICSENS.2010.5690638 |
