| Title | A Monolithic Inertial Measurement Unit Fabricated with Improved DRIE Post-CMOS Process |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Sun, H., K. Jia, Z. Yang Guo, X. S. Liu, G. Zhen Yan, and H. Xie |
| Publisher | IEEE |
| Title | A Monolithic Inertial Measurement Unit Fabricated with Improved DRIE Post-CMOS Process |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Sun, H., K. Jia, Z. Yang Guo, X. S. Liu, G. Zhen Yan, and H. Xie |
| Publisher | IEEE |