Title | Normally On/Off Integrated Latching Acceleration Switch With Controlled Fracture Beams and Independent Multicontact |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Guo, Z. Yang, Q. Cheng Zhao, L. Tao Lin, Z. Chuan Yang, H. Xie, and G. Zhen Yan |
Journal | IEEE Electron Device Letters |
Volume | 31 |
Issue | 2 |
Pagination | 129 - 131 |
Date Published | 02/2010 |
ISSN | 1558-0563 |
Keywords | Acceleration switches, integrated, latching switches, microelectromechanical devices, normally OFF, normally ON |
Abstract | This letter reports an acceleration latching switch with integrated normally on/off paths. The normally on path, formed by notched beams connected in series, will be broken and latched to reach the open state when the acceleration exceeds the threshold. A multicontact is adopted for the normally off path, while both paths are mechanically separated from the proof mass to prevent them from the impact of the proof mass at the latched state. Experimental results show that the latching shock is 10 000 G, and the response time is about 0.1 ms. The normally on path has an on-state resistance of 4.0 ÿ and an allowable current of 200 mA, whereas the normally off path has an on-state resistance of 3.8 ÿ and a maximum current of 140 mA. |
URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5382602 |
DOI | 10.1109/LED.2009.2036575 |
Short Title | IEEE Electron Device Lett. |