| Title | Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Guo, Z. Yang, X. S. Liu, Z. Chuan Yang, Q. Cheng Zhao, L. Tao Lin, H. Xie, and G. Zhen Yan |
| Conference Name | 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publisher | IEEE |
| Conference Location | Wanchai, Hong Kong, China |
| ISBN Number | 978-1-4244-5761-8 |
| DOI | 10.1109/MEMSYS.2010.5442514 |
