Publications

Found 36 results
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Zhang, X., C. Duan, L. Liu, X. Li, and H. Xie, "A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage", Sensors and Actuators A: Physical, vol. 233, pp. 239 - 245, 09/2015.
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Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.
Zhang, X., B. Li, X. Li, and H. Xie, "A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten", TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, IEEE, pp. 912 - 915, 6/2015.
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Duan, C., W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie, "A Self-Aligned 45°-Tilted Two-Axis Scanning Micromirror for Side-View Imaging", Journal of Microelectromechanical Systems, vol. 4, pp. 799-811, 2016.
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Wang, H., L. Zhou, X. Zhang, and H. Xie, "Thermal Reliability Study of an Electrothermal MEMS Mirror", IEEE Transactions on Device and Materials Reliability, pp. 1 - 1, Jan-01-2018.
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Wang, D., X. Zhang, L. Zhou, M. Liang, D. Zhang, and H. Xie, "An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.
Park, H-C., X. Zhang, W. Yuan, L. Zhou, H. Xie, and X. Li, "Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT", Optics Letters, vol. 44, issue 9, pp. 2232, Jan-01-2019.
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Torres, D., T. Wang, J. Zhang, X. Zhang, S. Dooley, X. Tan, H. Xie, and N. Sepulveda, "VO₂-Based MEMS Mirrors", Journal of Microelectromechanical Systems, pp. 780-787, 2016.
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Zhang, X., L. Zhou, C. Duan, D. Zheng, S. Koppal, Q. Tanguy, and H. Xie, "A wide-angle immersed MEMS mirror and its application in optical coherence tomography", 2016 International Conference on Optical MEMS and Nanophotonics (OMN), Singapore, Singapore, IEEE, 2016.
Zhang, X., S. J. Koppal, R. Zhang, L. Zhou, E. Butler, and H. Xie, "Wide-angle structured light with a scanning MEMS mirror in liquid", Optics Express, vol. 24, issue 4, no. 4, pp. 3479-3487, 02/2016.