Title | A Self-Aligned 45°-Tilted Two-Axis Scanning Micromirror for Side-View Imaging |
Publication Type | Journal Article |
Year of Publication | 2016 |
Authors | Duan, C., W. Wang, X. Zhang, L. Zhou, A. Pozzi, and H. Xie |
Journal | Journal of Microelectromechanical Systems |
Volume | 4 |
Pagination | 799-811 |
ISSN | 1941-0158 |
DOI | 10.1109/JMEMS.2016.2562011 |
Short Title | J. Microelectromech. Syst. |
Refereed Designation | Refereed |