| Title | A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten |
| Publication Type | Conference Paper |
| Year of Publication | 2015 |
| Authors | Zhang, X., B. Li, X. Li, and H. Xie |
| Conference Name | TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Date Published | 6/2015 |
| Publisher | IEEE |
| Conference Location | Anchorage, AK, USA |
| DOI | 10.1109/TRANSDUCERS.2015.7181072 |
