A robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten

TitleA robust, fast electrothermal micromirror with symmetric bimorph actuators made of copper/tungsten
Publication TypeConference Paper
Year of Publication2015
AuthorsZhang, X., B. Li, X. Li, and H. Xie
Conference NameTRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Date Published6/2015
PublisherIEEE
Conference LocationAnchorage, AK, USA
DOI10.1109/TRANSDUCERS.2015.7181072