Publications
Found 4 results
Author Title Type [ Year
Filters: Author is Kemiao Jia and First Letter Of Title is M [Clear All Filters]
"Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage", 2007 Conference on Lasers and Electro-Optics (CLEO)2007 Conference on Lasers and Electro-Optics (CLEO), Baltimore, MD, USA, IEEE, pp. 1 - 2, 2007.
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"A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process", 2010 Ninth IEEE Sensors Conference (SENSORS 2010)2010 IEEE Sensors, Kona, HI, IEEE, pp. 1198 - 1202, 2010.
, "Multi-axis integrated CMOS-MEMS inertial sensors", 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, IEEE, pp. 1394 - 1395, 2010.
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