| Title | Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage |
| Publication Type | Conference Paper |
| Year of Publication | 2007 |
| Authors | Jia, K., and H. Xie |
| Conference Name | 2007 Conference on Lasers and Electro-Optics (CLEO)2007 Conference on Lasers and Electro-Optics (CLEO) |
| Publisher | IEEE |
| Conference Location | Baltimore, MD, USA |
| Abstract | This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation. |
| URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4452788 |
| DOI | 10.1109/CLEO.2007.4452788 |
