Publications
"A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements", J. Microelectromechanical Systems, vol. 16, no. 6, pp. 1289-1302, DEC, 2007.
, "A Surface Micromachined Capacitive Microphone for Aeroacoustic Applications", Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, June, 2008.
, "An Instrumentation Grade MEMS Condenser Microphone for Aeroacoustic Measurements", 46th AIAA Aerospace Sciences Meeting and Exhibit, AIAA-2008-257, January, 2008.
, "Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements", 44th AIAA Aerospace Sciences Meeting and Exhibit, AIAA Paper 2006-1246, Reno, NV, January, 2006.
, "Surface and Bulk Micromachined Dual Back-Plate Condenser Microphone", 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), Miami, FL, January, 2005.
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