Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements

TitleDevelopment of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements
Publication TypeConference Paper
Year of Publication2006
AuthorsMartin, D., J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida
Conference Name44th AIAA Aerospace Sciences Meeting and Exhibit, AIAA Paper 2006-1246
Date PublishedJanuary
Conference LocationReno, NV