Title | Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements |
Publication Type | Conference Paper |
Year of Publication | 2006 |
Authors | Martin, D., J. Liu, K. Kadirvel, R. M. Fox, M. Sheplak, and T. Nishida |
Conference Name | 44th AIAA Aerospace Sciences Meeting and Exhibit, AIAA Paper 2006-1246 |
Date Published | January |
Conference Location | Reno, NV |