| Title | A Surface Micromachined Capacitive Microphone for Aeroacoustic Applications |
| Publication Type | Conference Paper |
| Year of Publication | 2008 |
| Authors | Martin, D., K. Kadirvel, T. Nishida, and M. Sheplak |
| Conference Name | Solid-State Sensor, Actuator and Microsystems Workshop |
| Date Published | June |
| Conference Location | Hilton Head, SC |
| Abstract | This paper presents improved results for a micromachined dual-backplate condenser microphone designed for aeroacoustic applications. Previous microphone characterization yielded an unacceptably high noise floor. This paper presents improvements to the noise floor through the use of a low-noise voltage amplifier and improved packaging. With bias voltages of |
