Surface and Bulk Micromachined Dual Back-Plate Condenser Microphone

TitleSurface and Bulk Micromachined Dual Back-Plate Condenser Microphone
Publication TypeConference Paper
Year of Publication2005
AuthorsMartin, D., K. Kadirvel, J. Liu, R. M. Fox, M. Sheplak, and T. Nishida
Conference Name18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005)
Date PublishedJanuary
Conference LocationMiami, FL