Title | Surface and Bulk Micromachined Dual Back-Plate Condenser Microphone |
Publication Type | Conference Paper |
Year of Publication | 2005 |
Authors | Martin, D., K. Kadirvel, J. Liu, R. M. Fox, M. Sheplak, and T. Nishida |
Conference Name | 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005) |
Date Published | January |
Conference Location | Miami, FL |