Publications
"A mems variable optical attenuator based on a vertical comb drive with self-elevated stators", Sensors and Actuators A: Physical, vol. 271, pp. 398 - 408, Jan-03-2018.
, "An auto-aligned vertical comb drive for low-cost variable optical attenuators", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.
, "Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1831-1834, June, 2013.
, "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 526-529, June, 2013.
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