| Title | An auto-aligned vertical comb drive for low-cost variable optical attenuators |
| Publication Type | Conference Paper |
| Year of Publication | 2017 |
| Authors | Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie |
| Conference Name | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
| Publisher | IEEE |
| Conference Location | Kaohsiung |
| URL | http://ieeexplore.ieee.org/document/7994126/ |
| DOI | 10.1109/TRANSDUCERS.2017.7994126 |
