| Title | A mems variable optical attenuator based on a vertical comb drive with self-elevated stators |
| Publication Type | Journal Article |
| Year of Publication | 2018 |
| Authors | Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie |
| Journal | Sensors and Actuators A: Physical |
| Volume | 271 |
| Pagination | 398 - 408 |
| Date Published | Jan-03-2018 |
| ISSN | 09244247 |
| URL | http://linkinghub.elsevier.com/retrieve/pii/S0924424717317351 |
| DOI | 10.1016/j.sna.2017.11.043 |
| Short Title | Sensors and Actuators A: Physical |
