Publications

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Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie, "A mems variable optical attenuator based on a vertical comb drive with self-elevated stators", Sensors and Actuators A: Physical, vol. 271, pp. 398 - 408, Jan-03-2018.
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Wang, W., Q. Chen, D. Wang, L. Zhou, and H. Xie, "A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift", 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, IEEE, 2017.
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Cheng, J., W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, and H. Xie, "An auto-aligned vertical comb drive for low-cost variable optical attenuators", 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, IEEE, 2017.