Publications
Found 355 results
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"Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.
, "A SCS CMOS micromirror for optical coherence tomographic imaging", MEMS 2002 IEEE International Conference. , Las Vegas, NV, USA, IEEE, pp. 495 - 498, 2002.
, "Vertical Comb-finger Capacitive Actuation and Sensing for CMOS-MEMS", Sensors & Actuators, vol. 95, pp. 212-221, 01/2002.
, "Endoscopic Optical Coherence Tomography Based on a CMOS-MEMS micromirror", Optics Letters, vol. 26, no. 24, pp. 1966-1968, DEC, 2001.
, "A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control", IEEE Transaction on Magnetics, vol. 37, no. 4, pp. 1915-1918, JUL, 2001.
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